The Temperature Coefficients of Frequency of Surface Acoustic Wave Devices With SiOxNy Passivation Films on LiTaO3 Substrates

von Nishimura, Atsushi
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2021)

Correlation between propagation loss and silicon dioxide film properties for surface acoustic wave devices

von Matsuda, Satoru
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2013)

Use of fluorine-doped silicon oxide for temperature compensation of radio frequency surface acoustic wave devices

von Matsuda, Satoru
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2012)

Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices

von Matsuda, Satoru
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2011)