Interface characterization of B4C-based multilayers by X-ray grazing-incidence reflectivity and diffuse scattering
B4C-based multilayers have important applications for soft to hard X-rays. In this paper, X-ray grazing-incidence reflectivity and diffuse scattering, combining various analysis methods, were used to characterize the structure of B4C-based multilayers including layer thickness, density, interfacial...
| Publié dans: | Journal of synchrotron radiation. - 1994. - 20(2013), Pt 3 vom: 10. Mai, Seite 449-54 |
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| Auteur principal: | |
| Autres auteurs: | , |
| Format: | Article en ligne |
| Langue: | English |
| Publié: |
2013
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| Accès à la collection: | Journal of synchrotron radiation |
| Sujets: | Journal Article X-ray reflectivity aging boron carbide diffuse scattering interface multilayer Boron Compounds boron carbonitride Carbon |
| Accès en ligne |
Volltext |