Organic vapor passivation of silicon at room temperature

Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Bibliographische Detailangaben
Veröffentlicht in:Advanced materials (Deerfield Beach, Fla.). - 1998. - 25(2013), 14 vom: 11. Apr., Seite 2078-83
1. Verfasser: Yang, Rong (VerfasserIn)
Weitere Verfasser: Buonassisi, Tonio, Gleason, Karen K
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2013
Zugriff auf das übergeordnete Werk:Advanced materials (Deerfield Beach, Fla.)
Schlagworte:Journal Article Research Support, Non-U.S. Gov't
LEADER 01000naa a22002652 4500
001 NLM224511130
003 DE-627
005 20231224063053.0
007 cr uuu---uuuuu
008 231224s2013 xx |||||o 00| ||eng c
024 7 |a 10.1002/adma.201204382  |2 doi 
028 5 2 |a pubmed24n0748.xml 
035 |a (DE-627)NLM224511130 
035 |a (NLM)23355317 
040 |a DE-627  |b ger  |c DE-627  |e rakwb 
041 |a eng 
100 1 |a Yang, Rong  |e verfasserin  |4 aut 
245 1 0 |a Organic vapor passivation of silicon at room temperature 
264 1 |c 2013 
336 |a Text  |b txt  |2 rdacontent 
337 |a ƒaComputermedien  |b c  |2 rdamedia 
338 |a ƒa Online-Ressource  |b cr  |2 rdacarrier 
500 |a Date Completed 23.09.2013 
500 |a Date Revised 30.09.2020 
500 |a published: Print-Electronic 
500 |a Citation Status PubMed-not-MEDLINE 
520 |a Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. 
520 |a A simple, inexpensive, efficient, and scalable method to create air-stable organic surface passivation layers on silicon using a vapor-phase treatment is demonstrated. A variant of initiated chemical vapor deposition is used to synthesize a thin film that acts as both a passivation layer and an antireflective coating. The lowest surface recombination velocity reported to date is achieved and maintained during prolonged exposure to air 
650 4 |a Journal Article 
650 4 |a Research Support, Non-U.S. Gov't 
700 1 |a Buonassisi, Tonio  |e verfasserin  |4 aut 
700 1 |a Gleason, Karen K  |e verfasserin  |4 aut 
773 0 8 |i Enthalten in  |t Advanced materials (Deerfield Beach, Fla.)  |d 1998  |g 25(2013), 14 vom: 11. Apr., Seite 2078-83  |w (DE-627)NLM098206397  |x 1521-4095  |7 nnns 
773 1 8 |g volume:25  |g year:2013  |g number:14  |g day:11  |g month:04  |g pages:2078-83 
856 4 0 |u http://dx.doi.org/10.1002/adma.201204382  |3 Volltext 
912 |a GBV_USEFLAG_A 
912 |a SYSFLAG_A 
912 |a GBV_NLM 
912 |a GBV_ILN_350 
951 |a AR 
952 |d 25  |j 2013  |e 14  |b 11  |c 04  |h 2078-83