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231224s2012 xx |||||o 00| ||eng c |
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|a 10.1021/la203599c
|2 doi
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|a pubmed24n0720.xml
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|a eng
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|a Riazanova, Anastasia V
|e verfasserin
|4 aut
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|a Pattern shape control for heat treatment purification of electron-beam-induced deposition of gold from the Me2Au(acac) precursor
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|c 2012
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|a Text
|b txt
|2 rdacontent
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|a ƒaComputermedien
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|2 rdamedia
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|a ƒa Online-Ressource
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|2 rdacarrier
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|a Date Completed 06.08.2012
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|a Date Revised 10.04.2012
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|a published: Print-Electronic
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|a Citation Status PubMed-not-MEDLINE
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|a © 2012 American Chemical Society
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|a Gold structures can be created in a scanning electron microscope (SEM) from the Me(2)Au(acac) precursor by direct writing with the electron beam. The as-deposited purity is usually poor, and a common purification approach is a post-annealing step that indeed is effective but also induces a volume reduction because of carbon loss and an undesirable reconfiguration of the gold structure, resulting in the loss of the original shape. We studied the shape change as a result of such purification, and to minimize this effect, the application of a tantalum and chromium buffer layer was investigated. These buffer materials are well-known for their good adhesion properties. We confirm by dedicated SEM, atomic force microscopy (AFM), and transmission electron microscopy (TEM) analysis that, for the creation of a uniform Au structure, tantalum is a better buffer layer material than chromium. Post-annealing of the Au electron-beam-induced deposition (EBID) patterns for 1 h at 600 °C in air resulted in a dramatic purity increase (from 8-12 atomic % Au to above 92 atomic % Au). The uncovered part of the tantalum layer can be easily etched away, resulting in a well-defined, high-purity, gold structure
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|a Journal Article
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1 |
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|a Rikers, Yuri G M
|e verfasserin
|4 aut
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|a Mulders, Johannes J L
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Belova, Lyubov M
|e verfasserin
|4 aut
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| 773 |
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|i Enthalten in
|t Langmuir : the ACS journal of surfaces and colloids
|d 1992
|g 28(2012), 14 vom: 10. Apr., Seite 6185-91
|w (DE-627)NLM098181009
|x 1520-5827
|7 nnns
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| 773 |
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|g volume:28
|g year:2012
|g number:14
|g day:10
|g month:04
|g pages:6185-91
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|u http://dx.doi.org/10.1021/la203599c
|3 Volltext
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