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231224s2012 xx |||||o 00| ||eng c |
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|a 10.1002/adma.201103817
|2 doi
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|a pubmed25n0712.xml
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|a (DE-627)NLM213781719
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|a (NLM)22162030
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|a DE-627
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|e rakwb
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|a eng
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|a Jeong, Hyeon Su
|e verfasserin
|4 aut
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|a Chiral nematic fluids as masks for lithography
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|c 2012
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|a Text
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|2 rdacontent
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|a ƒaComputermedien
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|2 rdamedia
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|a ƒa Online-Ressource
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|a Date Completed 18.08.2015
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|a Date Revised 30.09.2020
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|a published: Print-Electronic
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|a Citation Status MEDLINE
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|a Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
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|a A lithographic scheme is reported that uses a cholesteric liquid crystal with its helical axis in the plane of the sample as a "mask" for imprinting patterns in a photoresist over a large area. On the application of an electric field the cholesteric liquid crystals produce a texture that acts as a lattice of cylindrical lenses for one polarization of a light beam. This is used in photolithography to create parallel lines over large areas
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|a Journal Article
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|a Research Support, Non-U.S. Gov't
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|a cholesteric liquid crystals
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|a lithography
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|a photomasks
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|a self-assembly
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|a Kim, Yun Ho
|e verfasserin
|4 aut
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1 |
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|a Lee, Ji Sun
|e verfasserin
|4 aut
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|a Kim, Jung Hyun
|e verfasserin
|4 aut
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|a Srinivasarao, Mohan
|e verfasserin
|4 aut
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|a Jung, Hee-Tae
|e verfasserin
|4 aut
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| 773 |
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|i Enthalten in
|t Advanced materials (Deerfield Beach, Fla.)
|d 1998
|g 24(2012), 3 vom: 17. Jan., Seite 381-4
|w (DE-627)NLM098206397
|x 1521-4095
|7 nnns
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|g volume:24
|g year:2012
|g number:3
|g day:17
|g month:01
|g pages:381-4
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|u http://dx.doi.org/10.1002/adma.201103817
|3 Volltext
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