Insight into unusual impurity absorbability of GeO(2) in GeO(2)∕Ge stacks

Adsorbed species and its diffusion behaviors in GeO(2)∕Ge stacks, which are future alternative metal-oxide-semiconductor (MOS) materials, have been investigated using various physical analyses. We clarified that GeO(2) rapidly absorbs moisture in air just after its exposure. After the absorbed moist...

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Détails bibliographiques

Publié dans:	Applied physics letters. - 1998. - 99(2011), 14 vom: 03. Okt., Seite 142101-1421013
Auteur principal:	Ogawa, Shingo (Auteur)
Autres auteurs:	Suda, Taichi, Yamamoto, Takashi, Kutsuki, Katsuhiro, Hideshima, Iori, Hosoi, Takuji, Shimura, Takayoshi, Watanabe, Heiji
Format:	Article
Langue:	English
Publié:	2011
Accès à la collection:	Applied physics letters
Sujets:	Journal Article