Insight into unusual impurity absorbability of GeO(2) in GeO(2)∕Ge stacks

Insight into unusual impurity absorbability of GeO(2) in GeO(2)∕Ge stacks

Adsorbed species and its diffusion behaviors in GeO(2)∕Ge stacks, which are future alternative metal-oxide-semiconductor (MOS) materials, have been investigated using various physical analyses. We clarified that GeO(2) rapidly absorbs moisture in air just after its exposure. After the absorbed moist...

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Bibliographische Detailangaben
Veröffentlicht in:Applied physics letters. - 1998. - 99(2011), 14 vom: 03. Okt., Seite 142101-1421013
1. Verfasser: Ogawa, Shingo (VerfasserIn)
Weitere Verfasser: Suda, Taichi, Yamamoto, Takashi, Kutsuki, Katsuhiro, Hideshima, Iori, Hosoi, Takuji, Shimura, Takayoshi, Watanabe, Heiji
Format: Aufsatz
Sprache:English
Veröffentlicht: 2011
Zugriff auf das übergeordnete Werk:Applied physics letters
Schlagworte:Journal Article