High-temperature langasite SAW oxygen sensor

High-temperature langasite SAW oxygen sensors using sputtered ZnO as a resistive gas-sensing layer were fabricated and tested. Sensitivity to oxygen gas was observed between 500°C to 700°C, with a sensitivity peak at about 625°C, consistent with the theoretical predictions of the acoustoelectric eff...

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Bibliographische Detailangaben
Veröffentlicht in:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 58(2011), 8 vom: 19. Aug., Seite 1538-40
1. Verfasser:	Zheng, Peng (VerfasserIn)
Weitere Verfasser:	Chin, Tao-Lun, Greve, David, Oppenheim, Irving, Malone, Vanessa, Cao, Limin
Format:	Online-Aufsatz
Sprache:	English
Veröffentlicht:	2011
Zugriff auf das übergeordnete Werk:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:	Journal Article La3Ga5SiO14 Silicates Oxygen S88TT14065 Zinc Oxide SOI2LOH54Z


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520			\|a High-temperature langasite SAW oxygen sensors using sputtered ZnO as a resistive gas-sensing layer were fabricated and tested. Sensitivity to oxygen gas was observed between 500°C to 700°C, with a sensitivity peak at about 625°C, consistent with the theoretical predictions of the acoustoelectric effect
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