High-temperature langasite SAW oxygen sensor
High-temperature langasite SAW oxygen sensors using sputtered ZnO as a resistive gas-sensing layer were fabricated and tested. Sensitivity to oxygen gas was observed between 500°C to 700°C, with a sensitivity peak at about 625°C, consistent with the theoretical predictions of the acoustoelectric eff...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 58(2011), 8 vom: 19. Aug., Seite 1538-40
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| 1. Verfasser: |
Zheng, Peng
(VerfasserIn) |
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| Weitere Verfasser: |
Chin, Tao-Lun,
Greve, David,
Oppenheim, Irving,
Malone, Vanessa,
Cao, Limin |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2011
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article
La3Ga5SiO14
Silicates
Oxygen
S88TT14065
Zinc Oxide
SOI2LOH54Z |
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