Electro-mechanical coupling in shear-mode FBAR with piezoelectric modulated thin film
© 2011 IEEE
| Publié dans: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 58(2011), 4 vom: 02. Apr., Seite 685-8 |
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| Format: | Article en ligne |
| Langue: | English |
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2011
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| Accès à la collection: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Sujets: | Letter Research Support, Non-U.S. Gov't Membranes, Artificial |
| Accès en ligne |
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