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231224s2011 xx |||||o 00| ||eng c |
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|a 10.1109/TUFFC.2011.1860
|2 doi
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|a pubmed25n0692.xml
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|a DE-627
|b ger
|c DE-627
|e rakwb
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|a eng
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1 |
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|a Milyutin, Evgeny
|e verfasserin
|4 aut
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|a Electro-mechanical coupling in shear-mode FBAR with piezoelectric modulated thin film
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|c 2011
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|a Text
|b txt
|2 rdacontent
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|a ƒaComputermedien
|b c
|2 rdamedia
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|a ƒa Online-Ressource
|b cr
|2 rdacarrier
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|a Date Completed 23.08.2011
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|a Date Revised 21.04.2011
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|a published: Print
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|a Citation Status MEDLINE
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|a © 2011 IEEE
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|a The electro-mechanical coupling and resonance characteristics of a piezoelectric modulated thin film bulk acoustic wave resonator (PMBAR) is described quantitatively. The derived 1-D analytical model is in agreement with 2-D finite element modeling (FEM). The modeling shows that a pure shear mode excitation can be achieved and that coupling of parasitic Lamb waves is reduced in this design
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|a Letter
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|a Research Support, Non-U.S. Gov't
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|a Membranes, Artificial
|2 NLM
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| 700 |
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|a Muralt, Paul
|e verfasserin
|4 aut
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|i Enthalten in
|t IEEE transactions on ultrasonics, ferroelectrics, and frequency control
|d 1986
|g 58(2011), 4 vom: 02. Apr., Seite 685-8
|w (DE-627)NLM098181017
|x 1525-8955
|7 nnas
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| 773 |
1 |
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|g volume:58
|g year:2011
|g number:4
|g day:02
|g month:04
|g pages:685-8
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|u http://dx.doi.org/10.1109/TUFFC.2011.1860
|3 Volltext
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|a AR
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|d 58
|j 2011
|e 4
|b 02
|c 04
|h 685-8
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