A laser-activated MEMS transducer for efficient generation of narrowband longitudinal ultrasonic waves
In this paper, we demonstrate an optically powered microelectromechanical system (MEMS) transducer. It was designed and fabricated using MEMS techniques, and can generate narrowband ultrasonic bulk waves from a broadband laser excitation pulse with high efficiency. The transducer is a two-mask-level...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 58(2011), 2 vom: 15. Feb., Seite 470-6
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| 1. Verfasser: |
Chen, Xuesheng
(VerfasserIn) |
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| Weitere Verfasser: |
Stratoudaki, Theodosia,
Sharples, Steve D,
Clark, Matt |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2011
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article |
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