A laser-activated MEMS transducer for efficient generation of narrowband longitudinal ultrasonic waves

In this paper, we demonstrate an optically powered microelectromechanical system (MEMS) transducer. It was designed and fabricated using MEMS techniques, and can generate narrowband ultrasonic bulk waves from a broadband laser excitation pulse with high efficiency. The transducer is a two-mask-level...

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Détails bibliographiques
Publié dans:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 58(2011), 2 vom: 15. Feb., Seite 470-6
Auteur principal: Chen, Xuesheng (Auteur)
Autres auteurs: Stratoudaki, Theodosia, Sharples, Steve D, Clark, Matt
Format: Article en ligne
Langue:English
Publié: 2011
Accès à la collection:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Sujets:Journal Article