Photoacid generating ligands for development of positive-tone directly photopatternable metal complexes

Photoacid generating ligands, 4-(2-nitrobenzy-loxycarbonyl)catechol and 4-(6-nitroveratryloxycarbonyl)catechol, and indium tin and titanium complexes thereof, were synthesized. These metal complexes perform as positive-tone, directly photopatternable indium tin oxide (ITO) or titanium oxide film pre...

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Veröffentlicht in:Langmuir : the ACS journal of surfaces and colloids. - 1999. - 27(2011), 6 vom: 15. März, Seite 3157-65
1. Verfasser: Cordonier, Christopher E J (VerfasserIn)
Weitere Verfasser: Nakamura, Akimasa, Shimada, Kazuhiko, Fujishima, Akira
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2011
Zugriff auf das übergeordnete Werk:Langmuir : the ACS journal of surfaces and colloids
Schlagworte:Journal Article
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520 |a Photoacid generating ligands, 4-(2-nitrobenzy-loxycarbonyl)catechol and 4-(6-nitroveratryloxycarbonyl)catechol, and indium tin and titanium complexes thereof, were synthesized. These metal complexes perform as positive-tone, directly photopatternable indium tin oxide (ITO) or titanium oxide film precursors. After exposure, acid-bearing selectively soluble complexes could be removed to give patterned films upon developing in aqueous base, which were transformable to the corresponding pattern-preserving metal oxide film. Micropatterning of ITO and titanium oxide films was accomplished with the photoreactivity of the 2-nitrobenzyloxycarbonyl (NBOC) and 6-nitroveratryloxycarbonyl (NVOC) moiety bearing ligands 
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700 1 |a Nakamura, Akimasa  |e verfasserin  |4 aut 
700 1 |a Shimada, Kazuhiko  |e verfasserin  |4 aut 
700 1 |a Fujishima, Akira  |e verfasserin  |4 aut 
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