Photoacid generating ligands for development of positive-tone directly photopatternable metal complexes
Photoacid generating ligands, 4-(2-nitrobenzy-loxycarbonyl)catechol and 4-(6-nitroveratryloxycarbonyl)catechol, and indium tin and titanium complexes thereof, were synthesized. These metal complexes perform as positive-tone, directly photopatternable indium tin oxide (ITO) or titanium oxide film pre...
Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1999. - 27(2011), 6 vom: 15. März, Seite 3157-65 |
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Weitere Verfasser: | , , |
Format: | Online-Aufsatz |
Sprache: | English |
Veröffentlicht: |
2011
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Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids |
Schlagworte: | Journal Article |
Zusammenfassung: | Photoacid generating ligands, 4-(2-nitrobenzy-loxycarbonyl)catechol and 4-(6-nitroveratryloxycarbonyl)catechol, and indium tin and titanium complexes thereof, were synthesized. These metal complexes perform as positive-tone, directly photopatternable indium tin oxide (ITO) or titanium oxide film precursors. After exposure, acid-bearing selectively soluble complexes could be removed to give patterned films upon developing in aqueous base, which were transformable to the corresponding pattern-preserving metal oxide film. Micropatterning of ITO and titanium oxide films was accomplished with the photoreactivity of the 2-nitrobenzyloxycarbonyl (NBOC) and 6-nitroveratryloxycarbonyl (NVOC) moiety bearing ligands |
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Beschreibung: | Date Completed 21.10.2014 Date Revised 04.02.2014 published: Print-Electronic Citation Status PubMed-not-MEDLINE |
ISSN: | 1520-5827 |
DOI: | 10.1021/la104259f |