Coupling-of-modes analysis of thin film plate acoustic wave resonators utilizing the S0 Lamb mode
In this work the applicability of the coupling-of-modes (COM) approach to the analysis of thin AlN film plate acoustic resonators (FPAR), utilizing the S0 Lamb wave, is discussed. Analysis based on the Floquet-Bloch theorem as well as COM parameter extraction from a micromachined FPAR test structure...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 57(2010), 4 vom: 15. Apr., Seite 801-7 |
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| Format: | Online-Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2010
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article Research Support, Non-U.S. Gov't |
| Online verfügbar |
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