Coupling-of-modes analysis of thin film plate acoustic wave resonators utilizing the S0 Lamb mode

In this work the applicability of the coupling-of-modes (COM) approach to the analysis of thin AlN film plate acoustic resonators (FPAR), utilizing the S0 Lamb wave, is discussed. Analysis based on the Floquet-Bloch theorem as well as COM parameter extraction from a micromachined FPAR test structure...

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Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 57(2010), 4 vom: 15. Apr., Seite 801-7
1. Verfasser: Yantchev, Ventsislav (VerfasserIn)
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2010
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Journal Article Research Support, Non-U.S. Gov't
LEADER 01000naa a22002652 4500
001 NLM197219403
003 DE-627
005 20231223210107.0
007 cr uuu---uuuuu
008 231223s2010 xx |||||o 00| ||eng c
024 7 |a 10.1109/TUFFC.2010.1484  |2 doi 
028 5 2 |a pubmed24n0657.xml 
035 |a (DE-627)NLM197219403 
035 |a (NLM)20378442 
040 |a DE-627  |b ger  |c DE-627  |e rakwb 
041 |a eng 
100 1 |a Yantchev, Ventsislav  |e verfasserin  |4 aut 
245 1 0 |a Coupling-of-modes analysis of thin film plate acoustic wave resonators utilizing the S0 Lamb mode 
264 1 |c 2010 
336 |a Text  |b txt  |2 rdacontent 
337 |a ƒaComputermedien  |b c  |2 rdamedia 
338 |a ƒa Online-Ressource  |b cr  |2 rdacarrier 
500 |a Date Completed 28.06.2010 
500 |a Date Revised 09.04.2010 
500 |a published: Print 
500 |a Citation Status PubMed-not-MEDLINE 
520 |a In this work the applicability of the coupling-of-modes (COM) approach to the analysis of thin AlN film plate acoustic resonators (FPAR), utilizing the S0 Lamb wave, is discussed. Analysis based on the Floquet-Bloch theorem as well as COM parameter extraction from a micromachined FPAR test structure are simultaneously used to verify the applicability of the COM approach. Finite element model simulation is used to further study the contribution of the higher order mass loading effects over the Lamb wave propagation under a periodical grating. A possibility to achieve zero sensitivity of the FPAR resonance with respect to the grating strip thickness is identified and physically interpreted for the first time 
650 4 |a Journal Article 
650 4 |a Research Support, Non-U.S. Gov't 
773 0 8 |i Enthalten in  |t IEEE transactions on ultrasonics, ferroelectrics, and frequency control  |d 1986  |g 57(2010), 4 vom: 15. Apr., Seite 801-7  |w (DE-627)NLM098181017  |x 1525-8955  |7 nnns 
773 1 8 |g volume:57  |g year:2010  |g number:4  |g day:15  |g month:04  |g pages:801-7 
856 4 0 |u http://dx.doi.org/10.1109/TUFFC.2010.1484  |3 Volltext 
912 |a GBV_USEFLAG_A 
912 |a SYSFLAG_A 
912 |a GBV_NLM 
912 |a GBV_ILN_22 
912 |a GBV_ILN_24 
912 |a GBV_ILN_350 
951 |a AR 
952 |d 57  |j 2010  |e 4  |b 15  |c 04  |h 801-7