Reducing anchor loss in micromechanical extensional mode resonators
In this work, we propose a novel method to increase the quality factor of extensional mode micromechanical resonators. The proposed resonator topology is suitable for integration in a silicon-based process to fabricate micromechanical filters and oscillators. It is a half-wavelength-long strip excit...
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Détails bibliographiques
| Publié dans: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 57(2010), 2 vom: 15., Seite 448-54
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| Auteur principal: |
Taş, Vahdettin
(Auteur) |
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| Autres auteurs: |
Olcum, Selim,
Aksoy, M Deniz,
Atalar, Abdullah |
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| Format: | Article en ligne
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| Langue: | English |
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| Publié: |
2010
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| Accès à la collection: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Sujets: | Journal Article
Research Support, Non-U.S. Gov't |
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