Nonlinear modeling of an immersed transmitting capacitive micromachined ultrasonic transducer for harmonic balance analysis

von Oguz, H Kagan
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2010)

Reducing anchor loss in micromechanical extensional mode resonators

von Taş, Vahdettin
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2010)