Super-high-frequency two-port AlN contour-mode resonators for RF applications
This paper reports on the design and experimental verification of a new class of thin-film (250 nm) superhigh- frequency laterally-vibrating piezoelectric microelectromechanical (MEMS) resonators suitable for the fabrication of narrow-band MEMS filters operating at frequencies above 3 GHz. The devic...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 57(2010), 1 vom: 19. Jan., Seite 38-45
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| 1. Verfasser: |
Rinaldi, Matteo
(VerfasserIn) |
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| Weitere Verfasser: |
Zuniga, Chiara,
Zuo, Chengjie,
Piazza, Gianluca |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2010
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article
Research Support, U.S. Gov't, Non-P.H.S.
Membranes, Artificial |
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