Surface acoustic wave properties of (100) AlN films on diamond with different IDT positions

(100) AlN films have better surface acoustic wave (SAW) properties than (002) AlN films. In this research, (100) AlN films were combined with diamonds as a new composite SAW substrate. The SAW properties of (100) AlN films on diamonds were analyzed with 4 composite structures: interdigital transduce...

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Publié dans:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 56(2009), 6 vom: 15. Juni, Seite 1246-51
Auteur principal:	Lin, Zhi-Xun (Auteur)
Autres auteurs:	Wu, Sean, Ro, Ruyen, Lee, Maw-Shung
Format:	Article en ligne
Langue:	English
Publié:	2009
Accès à la collection:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Sujets:	Journal Article Research Support, Non-U.S. Gov't Aluminum Compounds Diamond 7782-40-3 aluminum nitride 7K47D7P3M0