Surface acoustic wave properties of (100) AlN films on diamond with different IDT positions
(100) AlN films have better surface acoustic wave (SAW) properties than (002) AlN films. In this research, (100) AlN films were combined with diamonds as a new composite SAW substrate. The SAW properties of (100) AlN films on diamonds were analyzed with 4 composite structures: interdigital transduce...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 56(2009), 6 vom: 15. Juni, Seite 1246-51
|
|---|
| 1. Verfasser: |
Lin, Zhi-Xun
(VerfasserIn) |
|---|
| Weitere Verfasser: |
Wu, Sean,
Ro, Ruyen,
Lee, Maw-Shung |
|---|
| Format: | Online-Aufsatz
|
|---|
| Sprache: | English |
|---|
| Veröffentlicht: |
2009
|
|---|
| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
|
|---|
| Schlagworte: | Journal Article
Research Support, Non-U.S. Gov't
Aluminum Compounds
Diamond
7782-40-3
aluminum nitride
7K47D7P3M0 |
|---|