Study on the formation of self-assembled monolayers on sol-gel processed hafnium oxide as dielectric layers
High dielectric constant (k) metal oxides such as hafnium oxide (HfO2) have gained significant interest due to their applications in microelectronics. In order to study and control the surface properties of hafnium oxide, self-assembled monolayers (SAMs) of four different long aliphatic molecules wi...
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Bibliographische Detailangaben
Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1992. - 25(2009), 4 vom: 17. Feb., Seite 2140-7
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1. Verfasser: |
Ting, Guy G 2nd
(VerfasserIn) |
Weitere Verfasser: |
Acton, Orb,
Ma, Hong,
Ka, Jae Won,
Jen, Alex K-Y |
Format: | Online-Aufsatz
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Sprache: | English |
Veröffentlicht: |
2009
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Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids
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Schlagworte: | Journal Article |