Study on the formation of self-assembled monolayers on sol-gel processed hafnium oxide as dielectric layers

High dielectric constant (k) metal oxides such as hafnium oxide (HfO2) have gained significant interest due to their applications in microelectronics. In order to study and control the surface properties of hafnium oxide, self-assembled monolayers (SAMs) of four different long aliphatic molecules wi...

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Veröffentlicht in:	Langmuir : the ACS journal of surfaces and colloids. - 1992. - 25(2009), 4 vom: 17. Feb., Seite 2140-7
1. Verfasser:	Ting, Guy G 2nd (VerfasserIn)
Weitere Verfasser:	Acton, Orb, Ma, Hong, Ka, Jae Won, Jen, Alex K-Y
Format:	Online-Aufsatz
Sprache:	English
Veröffentlicht:	2009
Zugriff auf das übergeordnete Werk:	Langmuir : the ACS journal of surfaces and colloids
Schlagworte:	Journal Article