A silicon electrostatic ultrasonic transducer

An electric ultrasonic transducer is developed by using a silicon IC process. Design considerations are first presented to obtain high sensitivity and the desired frequency responses in air. The measured transmitter sensitivity is 19.1 dB (0 dB=1 mubar/V) at a point 50 cm away from the devices, when...

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Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 36(1989), 6 vom: 15., Seite 620-7
1. Verfasser: Suzuki, K (VerfasserIn)
Weitere Verfasser: Higuchi, K, Tanigawa, H
Format: Aufsatz
Sprache:English
Veröffentlicht: 1989
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Journal Article
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520 |a An electric ultrasonic transducer is developed by using a silicon IC process. Design considerations are first presented to obtain high sensitivity and the desired frequency responses in air. The measured transmitter sensitivity is 19.1 dB (0 dB=1 mubar/V) at a point 50 cm away from the devices, when the devices are operated at 150 kHz. The receiving sensitivity is 0.47 mV/Pa in the 10-130-kHz range, with bias voltages as low as 30 V. An electronic sector scanning operation is also achieved by time-sequentially driving seven elements arranged in a linear array on the same chip. The results should be helpful in the design of phased-array transducers integrated with electronic scanning circuits 
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700 1 |a Higuchi, K  |e verfasserin  |4 aut 
700 1 |a Tanigawa, H  |e verfasserin  |4 aut 
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