Electromechanical coupling constant extraction of thin-film piezoelectric materials using a bulk acoustic wave resonator
Thin-film piezoelectric materials such as ZnO and AlN have great potential for on-chip devices such as filters, actuators and sensors. The electromechanical coupling constant is an important material parameter which determines the piezoelectric response of these films. This paper presents a techniqu...
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Détails bibliographiques
| Publié dans: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 45(1998), 1 vom: 15., Seite 257-63
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| Auteur principal: |
Naik, R S
(Auteur) |
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| Autres auteurs: |
Lutsky, J J,
Reif, R,
Sodini, C G |
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| Format: | Article en ligne
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| Langue: | English |
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| Publié: |
1998
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| Accès à la collection: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Sujets: | Journal Article |
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