Measurements of the bulk, C-axis electromechanical coupling constant as a function of AlN film quality

von Naik, R S
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2000)

Electromechanical coupling constant extraction of thin-film piezoelectric materials using a bulk acoustic wave resonator

von Naik, R S
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (1998)