$X-ray diffractometry and topography of lattice plane curvature in thermally deformed Si wafer$

X-ray diffractometry and topography of lattice plane curvature in thermally deformed Si wafer

The correlation between the microscopic lattice plane curvature and the dislocation structure in thermal warpage of 200 mm-diameter Czochralski Si (001) wafers has been investigated using high-resolution X-ray diffractometry and topography. It is found that the (004) lattice plane curvature is local...

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Bibliographische Detailangaben
Veröffentlicht in:	Journal of synchrotron radiation. - 1994. - 15(2008), Pt 1 vom: 01. Jan., Seite 96-9
1. Verfasser:	Yi, J M (VerfasserIn)
Weitere Verfasser:	Chu, Y S, Argunova, T S, Domagala, J Z, Je, J H
Format:	Aufsatz
Sprache:	English
Veröffentlicht:	2008
Zugriff auf das übergeordnete Werk:	Journal of synchrotron radiation
Schlagworte:	Journal Article Research Support, Non-U.S. Gov't Research Support, U.S. Gov't, Non-P.H.S.