Facile approach to the fabrication of a micropattern possessing nanoscale substructure

On the basis of the combined technologies of photolithography and reaction-induced phase separation (RIPS), a facile approach has been successfully developed for the fabrication of a micropattern possessing nanoscale substructure on the thin film surface. This approach involves three steps. In the f...

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Veröffentlicht in:Langmuir : the ACS journal of surfaces and colloids. - 1992. - 23(2007), 25 vom: 04. Dez., Seite 12663-8
1. Verfasser: Ji, Qiang (VerfasserIn)
Weitere Verfasser: Jiang, Xuesong, Yin, Jie
Format: Aufsatz
Sprache:English
Veröffentlicht: 2007
Zugriff auf das übergeordnete Werk:Langmuir : the ACS journal of surfaces and colloids
Schlagworte:Journal Article Research Support, Non-U.S. Gov't Acrylates Membranes, Artificial Methacrylates Polystyrenes polystyrene-block-poly(methyl methacrylate) trimethylolpropane triacrylate 4B67KGL96S
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245 1 0 |a Facile approach to the fabrication of a micropattern possessing nanoscale substructure 
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520 |a On the basis of the combined technologies of photolithography and reaction-induced phase separation (RIPS), a facile approach has been successfully developed for the fabrication of a micropattern possessing nanoscale substructure on the thin film surface. This approach involves three steps. In the first step, a thin film was prepared by spin coating from a solution of a commercial random copolymer, polystyrene-r-poly(methyl methacrylate) (PS-r-PMMA) and a commercial crosslinker, trimethylolpropane triacrylate (TMPTA). In the second step, photolithograph was performed with the thin film using a 250 W high-pressure mercury lamp to produce the micropattern. Finally, the resulting micropattern was annealed at 200 degrees C for a certain time, and reaction-induced phase separation occurred. After soaking in chloroform for 4 h, nanoscale substructure was obtained. The whole processes were traced by atomic force microscopy (AFM), X-ray photoelectron spectrometry (XPS), and Fourier transform infrared (FTIR) spectroscopy, and the results supported the proposed structure 
650 4 |a Journal Article 
650 4 |a Research Support, Non-U.S. Gov't 
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650 7 |a Membranes, Artificial  |2 NLM 
650 7 |a Methacrylates  |2 NLM 
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700 1 |a Jiang, Xuesong  |e verfasserin  |4 aut 
700 1 |a Yin, Jie  |e verfasserin  |4 aut 
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