Self-assembled biofilm of hydrophobins protects the silicon surface in the KOH wet etch process
The anisotropic wet micromachining of silicon, based on a water solution of potassium hydroxide (KOH), is a standard fabrication process that is extensively exploited in the realization of very complex microsystems, which comprise cantilevers, membranes, and bridges. A nanostructured self-assembled...
| Publié dans: | Langmuir : the ACS journal of surfaces and colloids. - 1985. - 23(2007), 15 vom: 17. Juli, Seite 7920-2 |
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| Auteur principal: | |
| Autres auteurs: | , , , , |
| Format: | Article |
| Langue: | English |
| Publié: |
2007
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| Accès à la collection: | Langmuir : the ACS journal of surfaces and colloids |
| Sujets: | Journal Article Fungal Proteins Hydroxides Membranes, Artificial Potassium Compounds potassium hydroxide WZH3C48M4T Silicon Z4152N8IUI |