An off-axis magnetron-sputtering system for in situ studies of artificial superlattices growth by synchrotron radiation scattering
A sputtering chamber for the growth of artificial superlattices of oxide-based materials is described. The chamber is designed to fit into a standard Huber eight-circle diffractometer. The chamber serves for investigation with synchrotron radiation of growth characteristics of oxide-based artificial...
| Veröffentlicht in: | Journal of synchrotron radiation. - 1994. - 14(2007), Pt 1 vom: 01. Jan., Seite 163-8 |
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| 1. Verfasser: | |
| Weitere Verfasser: | , , , |
| Format: | Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2007
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| Zugriff auf das übergeordnete Werk: | Journal of synchrotron radiation |
| Schlagworte: | Evaluation Study Journal Article Research Support, Non-U.S. Gov't Oxides |