An off-axis magnetron-sputtering system for in situ studies of artificial superlattices growth by synchrotron radiation scattering
A sputtering chamber for the growth of artificial superlattices of oxide-based materials is described. The chamber is designed to fit into a standard Huber eight-circle diffractometer. The chamber serves for investigation with synchrotron radiation of growth characteristics of oxide-based artificial...
| Publié dans: | Journal of synchrotron radiation. - 1994. - 14(2007), Pt 1 vom: 01. Jan., Seite 163-8 |
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| Auteur principal: | |
| Autres auteurs: | , , , |
| Format: | Article |
| Langue: | English |
| Publié: |
2007
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| Accès à la collection: | Journal of synchrotron radiation |
| Sujets: | Evaluation Study Journal Article Research Support, Non-U.S. Gov't Oxides |
| Résumé: | A sputtering chamber for the growth of artificial superlattices of oxide-based materials is described. The chamber is designed to fit into a standard Huber eight-circle diffractometer. The chamber serves for investigation with synchrotron radiation of growth characteristics of oxide-based artificial superlattices in situ. Two Be windows of large area in the vacuum chamber enable measurement of reflections of X-rays at entrance and exit angles up to approximately 50 degrees . Large perpendicular momentum transfers are practical with this apparatus. The possibility of investigating X-ray scattering in situ is demonstrated by observation of the effects of the modulation length and the stacking period on the growth characteristics of BaTiO(3)/LaNiO(3) artificial superlattices |
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| Description: | Date Completed 06.03.2007 Date Revised 10.12.2019 published: Print-Electronic Citation Status MEDLINE |
| ISSN: | 0909-0495 |