An off-axis magnetron-sputtering system for in situ studies of artificial superlattices growth by synchrotron radiation scattering

A sputtering chamber for the growth of artificial superlattices of oxide-based materials is described. The chamber is designed to fit into a standard Huber eight-circle diffractometer. The chamber serves for investigation with synchrotron radiation of growth characteristics of oxide-based artificial...

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Veröffentlicht in:Journal of synchrotron radiation. - 1994. - 14(2007), Pt 1 vom: 01. Jan., Seite 163-8
1. Verfasser: Liang, Yuan Chang (VerfasserIn)
Weitere Verfasser: Lee, Hsin Yi, Liu, Heng Jui, Hsieh, Yung Wei, Liang, Yung Ching
Format: Aufsatz
Sprache:English
Veröffentlicht: 2007
Zugriff auf das übergeordnete Werk:Journal of synchrotron radiation
Schlagworte:Evaluation Study Journal Article Research Support, Non-U.S. Gov't Oxides
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520 |a A sputtering chamber for the growth of artificial superlattices of oxide-based materials is described. The chamber is designed to fit into a standard Huber eight-circle diffractometer. The chamber serves for investigation with synchrotron radiation of growth characteristics of oxide-based artificial superlattices in situ. Two Be windows of large area in the vacuum chamber enable measurement of reflections of X-rays at entrance and exit angles up to approximately 50 degrees . Large perpendicular momentum transfers are practical with this apparatus. The possibility of investigating X-ray scattering in situ is demonstrated by observation of the effects of the modulation length and the stacking period on the growth characteristics of BaTiO(3)/LaNiO(3) artificial superlattices 
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650 4 |a Research Support, Non-U.S. Gov't 
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700 1 |a Lee, Hsin Yi  |e verfasserin  |4 aut 
700 1 |a Liu, Heng Jui  |e verfasserin  |4 aut 
700 1 |a Hsieh, Yung Wei  |e verfasserin  |4 aut 
700 1 |a Liang, Yung Ching  |e verfasserin  |4 aut 
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