Solidly mounted ZnO shear mode film bulk acoustic resonators for sensing applications in liquids
Solidly mounted film bulk acoustic resonators (FBAR) operating at 850 MHz in the shear vibration mode have been fabricated. C-axis inclined zinc oxide (ZnO) thin films realized by modified reactive magnetron sputtering were used: Coupling factors k2 of 1.7% and Q-factors of 312 were determined in ai...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1999. - 53(2006), 2 vom: 01. Feb., Seite 492-6 |
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| Weitere Verfasser: | , , , , |
| Format: | Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2006
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Evaluation Study Letter Research Support, Non-U.S. Gov't Complex Mixtures Membranes, Artificial Solutions Zinc Oxide SOI2LOH54Z |
| Zusammenfassung: | Solidly mounted film bulk acoustic resonators (FBAR) operating at 850 MHz in the shear vibration mode have been fabricated. C-axis inclined zinc oxide (ZnO) thin films realized by modified reactive magnetron sputtering were used: Coupling factors k2 of 1.7% and Q-factors of 312 were determined in air. Q-factors of 192 were measured in water, making these devices attractive for sensing applications in liquids, e.g., biosensing |
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| Beschreibung: | Date Completed 31.03.2006 Date Revised 10.12.2019 published: Print Citation Status MEDLINE |
| ISSN: | 0885-3010 |