Investigation of the scaling rules determining the performance of film bulk acoustic resonators operating as mass sensors

von Weber, Jan
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2007)

Solidly mounted ZnO shear mode film bulk acoustic resonators for sensing applications in liquids

von Link, Mathias
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2006)