Design, fabrication and characterization of a capacitive micromachined ultrasonic probe for medical imaging

Design, fabrication and characterization of a capacitive micromachined ultrasonic probe for medical imaging

In this paper we report the design, fabrication process, and characterization of a 64-elements capacitive micromachined ultrasonic transducer (cMUT), 3 MHz center frequency, 100% fractional bandwidth. Using this transducer, we developed a linear probe for application in medical echographic imaging....

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Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1999. - 52(2005), 12 vom: 23. Dez., Seite 2259-69
1. Verfasser: Caliano, Giosué (VerfasserIn)
Weitere Verfasser: Carotenuto, Riccardo, Cianci, Elena, Foglietti, Vittorio, Caronti, Alessandro, Iula, Antonio, Pappalardo, Massimo
Format: Aufsatz
Sprache:English
Veröffentlicht: 2005
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Evaluation Study Journal Article Research Support, Non-U.S. Gov't Membranes, Artificial