|
|
|
|
| LEADER |
01000naa a22002652 4500 |
| 001 |
NLM160546877 |
| 003 |
DE-627 |
| 005 |
20231223090322.0 |
| 007 |
tu |
| 008 |
231223s2006 xx ||||| 00| ||eng c |
| 028 |
5 |
2 |
|a pubmed24n0535.xml
|
| 035 |
|
|
|a (DE-627)NLM160546877
|
| 035 |
|
|
|a (NLM)16460108
|
| 040 |
|
|
|a DE-627
|b ger
|c DE-627
|e rakwb
|
| 041 |
|
|
|a eng
|
| 100 |
1 |
|
|a Mao, Yu
|e verfasserin
|4 aut
|
| 245 |
1 |
0 |
|a Positive-tone nanopatterning of chemical vapor deposited polyacrylic thin films
|
| 264 |
|
1 |
|c 2006
|
| 336 |
|
|
|a Text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a ohne Hilfsmittel zu benutzen
|b n
|2 rdamedia
|
| 338 |
|
|
|a Band
|b nc
|2 rdacarrier
|
| 500 |
|
|
|a Date Completed 09.05.2007
|
| 500 |
|
|
|a Date Revised 07.02.2006
|
| 500 |
|
|
|a published: Print
|
| 500 |
|
|
|a Citation Status PubMed-not-MEDLINE
|
| 520 |
|
|
|a Terpolymers of methyl alpha-chloroacrylate (MCA), methacrylic acid (MAA), and methacrylic anhydride (MAH) were synthesized by initiated chemical vapor deposition (iCVD) of MCA and MAA followed by low-temperature annealing that partially converts MAA into MAH. The MAA composition in the iCVD copolymer can be systematically varied between 37 and 85 mol % by adjusting the gas feed fractions of monomers. Study of the monomer reactivity ratios and the copolymer molecular weights supports the hypothesis of a surface propagation mechanism during the iCVD copolymerization. The carboxylic dehydration reaction at the annealing temperature of 160 degrees C is dominated by a mechanism of intramolecular cyclization, resulting in intramolecular MAH anhydride formation while preventing crosslink formation. The incorporation of highly electron-withdrawing anhydride functionality enhances chain scission susceptibility under electron-beam irradiation. P(MCA-MAA-MAH) terpolymer thin films can be completely developed at dosages as low as 20 microC/cm2 at 50 kV. High-quality positive-tone patterns were created with 60 nm feature size achieved in the vapor deposited films
|
| 650 |
|
4 |
|a Journal Article
|
| 700 |
1 |
|
|a Gleason, Karen K
|e verfasserin
|4 aut
|
| 773 |
0 |
8 |
|i Enthalten in
|t Langmuir : the ACS journal of surfaces and colloids
|d 1992
|g 22(2006), 4 vom: 14. Feb., Seite 1795-9
|w (DE-627)NLM098181009
|x 1520-5827
|7 nnns
|
| 773 |
1 |
8 |
|g volume:22
|g year:2006
|g number:4
|g day:14
|g month:02
|g pages:1795-9
|
| 912 |
|
|
|a GBV_USEFLAG_A
|
| 912 |
|
|
|a SYSFLAG_A
|
| 912 |
|
|
|a GBV_NLM
|
| 912 |
|
|
|a GBV_ILN_22
|
| 912 |
|
|
|a GBV_ILN_350
|
| 912 |
|
|
|a GBV_ILN_721
|
| 951 |
|
|
|a AR
|
| 952 |
|
|
|d 22
|j 2006
|e 4
|b 14
|c 02
|h 1795-9
|