CF4 plasma treatment of poly(dimethylsiloxane) : effect of fillers and its application to high-aspect-ratio UV embossing

Surface modification of poly(dimethylsiloxane) (PDMS) was carried out via CF4 plasma treatment. The test PDMS used contains significant amounts of quartz and silica fillers, while the control material is the same PDMS with quartz removed by centrifugation. Fluorination accompanied with roughening wa...

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Veröffentlicht in:Langmuir : the ACS journal of surfaces and colloids. - 1992. - 21(2005), 19 vom: 13. Sept., Seite 8905-12
1. Verfasser: Yan, Y H (VerfasserIn)
Weitere Verfasser: Chan-Park, M B, Yue, C Y
Format: Aufsatz
Sprache:English
Veröffentlicht: 2005
Zugriff auf das übergeordnete Werk:Langmuir : the ACS journal of surfaces and colloids
Schlagworte:Journal Article Research Support, Non-U.S. Gov't Dimethylpolysiloxanes Fluorocarbons Membranes, Artificial Silicones Quartz 14808-60-7 baysilon 63148-62-9 mehr... Argon 67XQY1V3KH carbon tetrafluoride 75-73-0 Silicon Dioxide 7631-86-9