Gold nanoparticle patterning of silicon wafers using chemical e-beam lithography

This paper demonstrates a novel facile method for fabrication of patterned arrays of gold nanoparticles on Si/SiO2 by combining electron beam lithography and self-assembly techniques. Our strategy is to use direct-write electron beam patterning to convert nitro functionality in self-assembled monola...

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Veröffentlicht in:Langmuir : the ACS journal of surfaces and colloids. - 1992. - 20(2004), 9 vom: 27. Apr., Seite 3766-8
1. Verfasser: Mendes, Paula M (VerfasserIn)
Weitere Verfasser: Jacke, Susanne, Critchley, Kevin, Plaza, Jose, Chen, Yu, Nikitin, Kirill, Palmer, Richard E, Preece, Jon A, Evans, Stephen D, Fitzmaurice, Donald
Format: Aufsatz
Sprache:English
Veröffentlicht: 2004
Zugriff auf das übergeordnete Werk:Langmuir : the ACS journal of surfaces and colloids
Schlagworte:Journal Article
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245 1 0 |a Gold nanoparticle patterning of silicon wafers using chemical e-beam lithography 
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520 |a This paper demonstrates a novel facile method for fabrication of patterned arrays of gold nanoparticles on Si/SiO2 by combining electron beam lithography and self-assembly techniques. Our strategy is to use direct-write electron beam patterning to convert nitro functionality in self-assembled monolayers of 3-(4-nitrophenoxy)-propyltrimethoxysilane to amino functionality, forming chemically well-defined surface architectures on the 100 nm scale. These nanopatterns are employed to guide the assembly of citrate-passivated gold nanoparticles according to their different affinities for amino and nitro groups. This kind of nanoparticle assembly offers an attractive new option for nanoparticle patterning a silicon surface, as relevant, for example, to biosensors, electronics, and optical devices 
650 4 |a Journal Article 
700 1 |a Jacke, Susanne  |e verfasserin  |4 aut 
700 1 |a Critchley, Kevin  |e verfasserin  |4 aut 
700 1 |a Plaza, Jose  |e verfasserin  |4 aut 
700 1 |a Chen, Yu  |e verfasserin  |4 aut 
700 1 |a Nikitin, Kirill  |e verfasserin  |4 aut 
700 1 |a Palmer, Richard E  |e verfasserin  |4 aut 
700 1 |a Preece, Jon A  |e verfasserin  |4 aut 
700 1 |a Evans, Stephen D  |e verfasserin  |4 aut 
700 1 |a Fitzmaurice, Donald  |e verfasserin  |4 aut 
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