High-performance EUV/soft X-ray ellipsometry system using multilayer mirrors
A high-performance EUV/soft X-ray ellipsometry system using multilayer mirrors has been developed. A couple of multilayer mirrors were used for the polarizer, and two multilayer mirrors were used for the rotating analyser. The multilayer mirrors were optimized to obtain a medium extinction of about...
| Publié dans: | Journal of synchrotron radiation. - 1994. - 5(1998), Pt 3 vom: 01. Mai, Seite 735-7 |
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| Auteur principal: | |
| Autres auteurs: | , , , |
| Format: | Article |
| Langue: | English |
| Publié: |
1998
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| Accès à la collection: | Journal of synchrotron radiation |
| Sujets: | Journal Article |