High-performance EUV/soft X-ray ellipsometry system using multilayer mirrors
A high-performance EUV/soft X-ray ellipsometry system using multilayer mirrors has been developed. A couple of multilayer mirrors were used for the polarizer, and two multilayer mirrors were used for the rotating analyser. The multilayer mirrors were optimized to obtain a medium extinction of about...
| Veröffentlicht in: | Journal of synchrotron radiation. - 1994. - 5(1998), Pt 3 vom: 01. Mai, Seite 735-7 |
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| 1. Verfasser: | |
| Weitere Verfasser: | , , , |
| Format: | Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
1998
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| Zugriff auf das übergeordnete Werk: | Journal of synchrotron radiation |
| Schlagworte: | Journal Article |