High-frequency, silicon-based ultrasonic nozzles using multiple Fourier horns

This paper presents the design, simulation, and characterization of microfabricated 0.5 MHz, silicon-based, ultrasonic nozzles. Each nozzle is made of a piezoelectric drive section and a silicon resonator consisting of multiple Fourier horns, each with half wavelength design and twice amplitude magn...

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Détails bibliographiques

Publié dans:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 51(2004), 3 vom: 07. März, Seite 277-85
Auteur principal:	Tsai, Shirley C (Auteur)
Autres auteurs:	Song, Yu L, Tseng, Terry K, Chou, Yuan F, Chen, Wei J, Tsai, Chen S
Format:	Article
Langue:	English
Publié:	2004
Accès à la collection:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Sujets:	Journal Article