Capacitive micromachined ultrasonic transducers next-generation arrays for acoustic imaging?

Capacitive micromachined ultrasonic transducers : next-generation arrays for acoustic imaging?

Piezoelectric materials have dominated the ultrasonic transducer technology. Recently, capacitive micromachined ultrasonic transducers (CMUTs) have emerged as an alternative technology offering advantages such as wide bandwidth, ease of fabricating large arrays, and potential for integration with el...

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Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1999. - 49(2002), 11 vom: 18. Nov., Seite 1596-610
1. Verfasser: Oralkan, Omer (VerfasserIn)
Weitere Verfasser: Ergun, A Sanli, Johnson, Jeremy A, Karaman, Mustafa, Demirci, Utkan, Kaviani, Kambiz, Lee, Thomas H, Khuri-Yakub, Butrus T
Format: Aufsatz
Sprache:English
Veröffentlicht: 2002
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Comparative Study Journal Article Research Support, Non-U.S. Gov't Research Support, U.S. Gov't, Non-P.H.S.