Capacitive micromachined ultrasonic transducers : next-generation arrays for acoustic imaging?

Piezoelectric materials have dominated the ultrasonic transducer technology. Recently, capacitive micromachined ultrasonic transducers (CMUTs) have emerged as an alternative technology offering advantages such as wide bandwidth, ease of fabricating large arrays, and potential for integration with el...

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Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1999. - 49(2002), 11 vom: 18. Nov., Seite 1596-610
1. Verfasser: Oralkan, Omer (VerfasserIn)
Weitere Verfasser: Ergun, A Sanli, Johnson, Jeremy A, Karaman, Mustafa, Demirci, Utkan, Kaviani, Kambiz, Lee, Thomas H, Khuri-Yakub, Butrus T
Format: Aufsatz
Sprache:English
Veröffentlicht: 2002
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Comparative Study Journal Article Research Support, Non-U.S. Gov't Research Support, U.S. Gov't, Non-P.H.S.
LEADER 01000caa a22002652 4500
001 NLM122685032
003 DE-627
005 20250203163206.0
007 tu
008 231222s2002 xx ||||| 00| ||eng c
028 5 2 |a pubmed25n0409.xml 
035 |a (DE-627)NLM122685032 
035 |a (NLM)12484483 
040 |a DE-627  |b ger  |c DE-627  |e rakwb 
041 |a eng 
100 1 |a Oralkan, Omer  |e verfasserin  |4 aut 
245 1 0 |a Capacitive micromachined ultrasonic transducers  |b next-generation arrays for acoustic imaging? 
264 1 |c 2002 
336 |a Text  |b txt  |2 rdacontent 
337 |a ohne Hilfsmittel zu benutzen  |b n  |2 rdamedia 
338 |a Band  |b nc  |2 rdacarrier 
500 |a Date Completed 04.02.2003 
500 |a Date Revised 16.09.2019 
500 |a published: Print 
500 |a Citation Status MEDLINE 
520 |a Piezoelectric materials have dominated the ultrasonic transducer technology. Recently, capacitive micromachined ultrasonic transducers (CMUTs) have emerged as an alternative technology offering advantages such as wide bandwidth, ease of fabricating large arrays, and potential for integration with electronics. The aim of this paper is to demonstrate the viability of CMUTs for ultrasound imaging. We present the first pulse-echo phased array B-scan sector images using a 128-element, one-dimensional (1-D) linear CMUT array. We fabricated 64- and 128-element 1-D CMUT arrays with 100% yield and uniform element response across the arrays. These arrays have been operated in immersion with no failure or degradation in performance over the time. For imaging experiments, we built a resolution test phantom roughly mimicking the attenuation properties of soft tissue. We used a PC-based experimental system, including custom-designed electronic circuits to acquire the complete set of 128 x 128 RF A-scans from all transmit-receive element combinations. We obtained the pulse-echo frequency response by analyzing the echo signals from wire targets. These echo signals presented an 80% fractional bandwidth around 3 MHz, including the effect of attenuation in the propagating medium. We reconstructed the B-scan images with a sector angle of 90 degrees and an image depth of 210 mm through offline processing by using RF beamforming and synthetic phased array approaches. The measured 6-dB lateral and axial resolutions at 135 mm depth were 0.0144 radians and 0.3 mm, respectively. The electronic noise floor of the image was more than 50 dB below the maximum mainlobe magnitude. We also performed preliminary investigations on the effects of crosstalk among array elements on the image quality. In the near field, some artifacts were observable extending out from the array to a depth of 2 cm. A tail also was observed in the point spread function (PSF) in the axial direction, indicating the existence of crosstalk. The relative amplitude of this tail with respect to the mainlobe was less than -20 dB 
650 4 |a Comparative Study 
650 4 |a Journal Article 
650 4 |a Research Support, Non-U.S. Gov't 
650 4 |a Research Support, U.S. Gov't, Non-P.H.S. 
700 1 |a Ergun, A Sanli  |e verfasserin  |4 aut 
700 1 |a Johnson, Jeremy A  |e verfasserin  |4 aut 
700 1 |a Karaman, Mustafa  |e verfasserin  |4 aut 
700 1 |a Demirci, Utkan  |e verfasserin  |4 aut 
700 1 |a Kaviani, Kambiz  |e verfasserin  |4 aut 
700 1 |a Lee, Thomas H  |e verfasserin  |4 aut 
700 1 |a Khuri-Yakub, Butrus T  |e verfasserin  |4 aut 
773 0 8 |i Enthalten in  |t IEEE transactions on ultrasonics, ferroelectrics, and frequency control  |d 1999  |g 49(2002), 11 vom: 18. Nov., Seite 1596-610  |w (DE-627)NLM098181017  |x 0885-3010  |7 nnns 
773 1 8 |g volume:49  |g year:2002  |g number:11  |g day:18  |g month:11  |g pages:1596-610 
912 |a GBV_USEFLAG_A 
912 |a SYSFLAG_A 
912 |a GBV_NLM 
912 |a GBV_ILN_22 
912 |a GBV_ILN_24 
912 |a GBV_ILN_350 
951 |a AR 
952 |d 49  |j 2002  |e 11  |b 18  |c 11  |h 1596-610