Deterministic retrieval of surface waviness by means of topography with coherent X-rays

A surface profile retrieval technique from multiple X-ray total reflection images taken at various distances with full coherent illumination is demonstrated. An experiment was performed using the 1 km-long BL29XU beamline at the SPring-8 facility, Japan. Obtained results are compared with results fr...

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Veröffentlicht in:Journal of synchrotron radiation. - 1994. - 9(2002), Pt 4 vom: 01. Juli, Seite 223-8
1. Verfasser: Souvorov, A (VerfasserIn)
Weitere Verfasser: Yabashi, M, Tamasaku, K, Ishikawa, T, Mori, Y, Yamauchi, K, Yamamura, K, Saito, A
Format: Aufsatz
Sprache:English
Veröffentlicht: 2002
Zugriff auf das übergeordnete Werk:Journal of synchrotron radiation
Schlagworte:Journal Article
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245 1 0 |a Deterministic retrieval of surface waviness by means of topography with coherent X-rays 
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520 |a A surface profile retrieval technique from multiple X-ray total reflection images taken at various distances with full coherent illumination is demonstrated. An experiment was performed using the 1 km-long BL29XU beamline at the SPring-8 facility, Japan. Obtained results are compared with results from the optical metrology technique (Fizeau's interferometer). Good agreement between X-ray and optical methods proves the validity of the current approach. Meanwhile, the sensitivity of the X-ray technique is several times higher than that of the standard one. This technique is well suited to the needs of characterizing grazing optics for new-generation X-ray sources 
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700 1 |a Yabashi, M  |e verfasserin  |4 aut 
700 1 |a Tamasaku, K  |e verfasserin  |4 aut 
700 1 |a Ishikawa, T  |e verfasserin  |4 aut 
700 1 |a Mori, Y  |e verfasserin  |4 aut 
700 1 |a Yamauchi, K  |e verfasserin  |4 aut 
700 1 |a Yamamura, K  |e verfasserin  |4 aut 
700 1 |a Saito, A  |e verfasserin  |4 aut 
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