Deterministic retrieval of surface waviness by means of topography with coherent X-rays
A surface profile retrieval technique from multiple X-ray total reflection images taken at various distances with full coherent illumination is demonstrated. An experiment was performed using the 1 km-long BL29XU beamline at the SPring-8 facility, Japan. Obtained results are compared with results fr...
Veröffentlicht in: | Journal of synchrotron radiation. - 1994. - 9(2002), Pt 4 vom: 01. Juli, Seite 223-8 |
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1. Verfasser: | |
Weitere Verfasser: | , , , , , , |
Format: | Aufsatz |
Sprache: | English |
Veröffentlicht: |
2002
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Zugriff auf das übergeordnete Werk: | Journal of synchrotron radiation |
Schlagworte: | Journal Article |