Deterministic retrieval of surface waviness by means of topography with coherent X-rays

A surface profile retrieval technique from multiple X-ray total reflection images taken at various distances with full coherent illumination is demonstrated. An experiment was performed using the 1 km-long BL29XU beamline at the SPring-8 facility, Japan. Obtained results are compared with results fr...

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Bibliographische Detailangaben
Veröffentlicht in:Journal of synchrotron radiation. - 1994. - 9(2002), Pt 4 vom: 01. Juli, Seite 223-8
1. Verfasser: Souvorov, A (VerfasserIn)
Weitere Verfasser: Yabashi, M, Tamasaku, K, Ishikawa, T, Mori, Y, Yamauchi, K, Yamamura, K, Saito, A
Format: Aufsatz
Sprache:English
Veröffentlicht: 2002
Zugriff auf das übergeordnete Werk:Journal of synchrotron radiation
Schlagworte:Journal Article