Ionization, electron attachment, and drift in CHF3
Using a pulsed Townsend technique, we have measured the effective ionization coefficient and the electron drift velocities in CHF(3). The density-normalized electric field intensity E/N ranged from 4 to 250 townsends (Td) (1 Td=10(-17) V cm(2)). The E/N value at which the effective ionization coeffi...
Veröffentlicht in: | Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics. - 1993. - 60(1999), 4 Pt B vom: 30. Okt., Seite 4990-2 |
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Weitere Verfasser: | , |
Format: | Aufsatz |
Sprache: | English |
Veröffentlicht: |
1999
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Zugriff auf das übergeordnete Werk: | Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics |
Schlagworte: | Journal Article |