Super-high-frequency two-port AlN contour-mode resonators for RF applications

von Rinaldi, Matteo
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2010)

1.05-GHz CMOS oscillator based on lateral- field-excited piezoelectric AlN contour- mode MEMS resonators

von Zuo, Chengjie
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2010)