Highly piezoelectric MgZr co-doped aluminum nitride-based vibrational energy harvesters

von Minh, Le Van
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2015)

Highly piezoelectric co-doped AlN thin films for wideband FBAR applications

von Yokoyama, Tsuyoshi
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2015)