A three-mask process for fabricating vacuum-sealed capacitive micromachined ultrasonic transducers using anodic bonding

von Yamaner, F Yalçın
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2015)

High-power CMUTs design and experimental verification

von Yamaner, F Yalçin
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2012)

An equivalent circuit model for transmitting capacitive micromachined ultrasonic transducers in collapse mode

von Olcum, Selim
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2011)

Deep-collapse operation of capacitive micromachined ultrasonic transducers

von Olcum, Selim
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2011)